Invention Application
- Patent Title: DEVICE AND A METHOD FOR IMAGING OF MICROSCOPIC OBJECTS
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Application No.: US17555792Application Date: 2021-12-20
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Publication No.: US20220197003A1Publication Date: 2022-06-23
- Inventor: Ziduo LIN , Murali JAYAPALA , Geert VANMEERBEECK , Abdulkadir YURT
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP20215954.7 20201221
- Main IPC: G02B21/36
- IPC: G02B21/36 ; G02B21/06 ; H01L27/146

Abstract:
According to an aspect of the present inventive concept there is provided a device for imaging of a microscopic object, the device comprising: an array of light sensitive areas sensitive to detect light spanning a wavelength range of at least 400-1200 nm; at least one light source comprising at least a first point of operation in which the at least one light source is configured to generate visible light, and a second point of operation in which the at least one light source is configured to generate infrared light, and being arranged to illuminate the microscopic object such that light is scattered by the microscopic object; wherein the array of light sensitive areas is configured to detect an interference pattern formed between the scattered light and non-scattered light; the device being configured to be set in a selected point of operation from the at least first and second points of operation, for detecting the interference pattern for imaging the microscopic object at a wavelength defined by the selected point of operation.
Public/Granted literature
- US12196942B2 Device and a method for imaging of microscopic objects Public/Granted day:2025-01-14
Information query