An integrated circuit includes a substrate, a reference contact coupled to the substrate, a capacitor over the substrate, and a substrate element. The capacitor includes a first conductive element having an associated parasitic capacitance and a second conductive element electrically isolated from the first conductive element. The substrate element is coupled to the first conductive element by the parasitic capacitance and coupled to the reference contact. The substrate element includes a conductive doped region in the substrate and aligned with the first conductive element and the reference contact.