Invention Application
- Patent Title: LASER CRYSTALLIZATION APPARATUS
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Application No.: US17503363Application Date: 2021-10-18
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Publication No.: US20220212291A1Publication Date: 2022-07-07
- Inventor: Akifumi Sangu , Je Kil Ryu , Cheol Ho Park , Hae Sook Lee , Jin Hong Jeun , Young Su Chae , Gyoo Wan Han
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0000899 20210105
- Main IPC: B23K26/50
- IPC: B23K26/50 ; B23K26/06

Abstract:
A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.
Information query