Invention Application
- Patent Title: Semiconductor Device and Method
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Application No.: US17656295Application Date: 2022-03-24
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Publication No.: US20220216201A1Publication Date: 2022-07-07
- Inventor: Chung-Chiang Wu , Shih-Hang Chiu , Chih-Chang Hung , I-Wei Yang , Shu-Yuan Ku , Cheng-Lung Hung , Da-Yuan Lee , Ching-Hwanq Su
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L27/11 ; H01L29/06

Abstract:
A method includes forming a first semiconductor fin in a substrate, forming a metal gate structure over the first semiconductor fin, removing a portion of the metal gate structure to form a first recess in the metal gate structure that is laterally separated from the first semiconductor fin by a first distance, wherein the first distance is determined according to a first desired threshold voltage associated with the first semiconductor fin, and filling the recess with a dielectric material.
Public/Granted literature
- US11728341B2 Semiconductor device and method Public/Granted day:2023-08-15
Information query
IPC分类: