Invention Application
- Patent Title: METAL-ASSISTED SINGLE CRYSTAL TRANSISTORS
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Application No.: US17701232Application Date: 2022-03-22
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Publication No.: US20220216347A1Publication Date: 2022-07-07
- Inventor: Van H. LE , Ashish AGRAWAL , Seung Hoon SUNG , Abhishek A. SHARMA , Ravi PILLARISETTY
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L29/786
- IPC: H01L29/786 ; C30B29/08 ; C30B29/40 ; H01L27/088

Abstract:
Described herein are apparatuses, systems, and methods associated with metal-assisted transistors. A single crystal semiconductor material may be seeded from a metal. The single crystal semiconductor material may form a channel region, a source, region, and/or a drain region of the transistor. The metal may form the source contact or drain contact, and the source region, channel region, and drain region may be stacked vertically on the source contact or drain contact. Alternatively, a metal-assisted semiconductor growth process may be used to form a single crystal semiconductor material on a dielectric material adjacent to the metal. The portion of the semiconductor material on the dielectric material may be used to form the transistor. Other embodiments may be described and claimed.
Public/Granted literature
- US11721766B2 Metal-assisted single crystal transistors Public/Granted day:2023-08-08
Information query
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