A method for supplying a sliding process material to or removing it from a surface of an object to be slid using a sliding part including a plurality of sliding bodies each having a flat working surface, the sliding part is regularly moved, preferably by a second driving mechanism, in parallel with the working surfaces of the sliding bodies and in a direction different from a moving direction of the sliding bodies while the sliding bodies are regularly moved, preferably by a first driving mechanism, in parallel with the working surfaces. This configuration uniformly supplies the sliding process material to the surface of the object to be slid.