公开(公告)号：US20220110217A1

公开(公告)日：2022-04-07

申请号：US17426446

申请日：2020-01-24

Applicant: DEXERIALS CORPORATION

Inventor： Akihiro SHIBATA ,  Masahiro NISHIMOTO ,  Yusuke TANAKA ,  Hirokazu ODAGIRI ,  Katsuhiro DOI

IPC: H05K3/34 ,  H01L23/00

Abstract: To prevent defects in microparticles from occurring in a case of arraying the microparticles having a diameter of less than or equal to 50 μm on a base material. Provided is a microparticle arraying mask for arraying microparticles having a diameter of less than or equal to 50 μm on a base material. The microparticle arraying mask has through-holes into which the microparticles are inserted. An opening plane of the through-holes on a microparticle supply side has an area smaller than an area of an opening plane of the through-holes on a microparticle discharge side. In a case of assuming that a direction from the opening plane on the microparticle supply side to the opening plane on the microparticle discharge side is a positive direction of a z-axis, and a sectional area of the through-holes vertical to the z-axis is A, dA(z)/dz>0 holds in a whole region in the through-holes along the z-axis, and Expression (1) below is satisfied: 0.4≤t/d≤1.0  (1).

公开(公告)号：US20220234073A1

公开(公告)日：2022-07-28

申请号：US17606922

申请日：2020-04-30

Applicant: DEXERIALS CORPORATION

Inventor： Takayuki SAITO ,  Masahiro NISHIMOTO ,  Ikuo MITSUSHIMA ,  Masaki KANEKO

IPC: B05D1/42 ,  B05D5/08

Abstract: A method for supplying a sliding process material to or removing it from a surface of an object to be slid using a sliding part including a plurality of sliding bodies each having a flat working surface, the sliding part is regularly moved, preferably by a second driving mechanism, in parallel with the working surfaces of the sliding bodies and in a direction different from a moving direction of the sliding bodies while the sliding bodies are regularly moved, preferably by a first driving mechanism, in parallel with the working surfaces. This configuration uniformly supplies the sliding process material to the surface of the object to be slid.

公开(公告)号：US20220250110A1

公开(公告)日：2022-08-11

申请号：US17606897

申请日：2020-04-30

Applicant: DEXERIALS CORPORATION

Inventor： Takayuki SAITO ,  Masahiro NISHIMOTO ,  Ikuo MITSUSHIMA ,  Masaki KANEKO

IPC: B05C11/02 ,  B05C13/02

Abstract: A sliding device configured to perform a sliding process on a surface of an object to be slid includes a sliding part including sliding bodies each having a flat working surface; a first driving mechanism configured to regularly move the sliding bodies in parallel with the working surfaces of the sliding bodies; and a second driving mechanism configured to regularly move the sliding part in parallel with the working surfaces in a direction different from a moving direction by the first driving mechanism while the first driving mechanism moves the sliding bodies. This enables uniform supply of the sliding process material onto the surface of the object to be slid or clean the surface of the object to be slid.