Invention Application
- Patent Title: BULK ACOUSTIC RESONATOR
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Application No.: US17307055Application Date: 2021-05-04
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Publication No.: US20220239278A1Publication Date: 2022-07-28
- Inventor: Sang Uk Son , Sung Wook Kim , Won Han , Jong Woon Kim , Jeong Hoon Ryou , Sang Heon Han
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0010053 20210125
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02 ; H03H9/13

Abstract:
A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(−0.59*F)] is [[ln{0.008 (μm)2}]/{−0.59*(3.5 GHz)}] or more and [[ln{0.022 (μm)2}]/{−0.59*(3.5 GHz)}] or less.
Public/Granted literature
- US12057822B2 Bulk acoustic resonator Public/Granted day:2024-08-06
Information query
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