Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE
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Application No.: US17517304Application Date: 2021-11-02
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Publication No.: US20220254650A1Publication Date: 2022-08-11
- Inventor: Do Young CHOI , Sung Min KIM , Cheol KIM , Hyo Jin KIM , Dae Won HA , Dong Woo HAN
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0017676 20210208
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/308

Abstract:
Provided is a semiconductor device. The semiconductor device comprises a first active pattern extending in a first direction on a substrate, a second active pattern which extends in the first direction and is adjacent to the first active pattern in a second direction different from the first direction, a field insulating film placed between the first active pattern and the second active pattern, a first gate structure which crosses the first active pattern, extends in the second direction, and includes a first gate electrode and a first gate spacer, a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate spacer, a gate separation structure placed on the field insulating film between the first gate structure and the second gate structure.
Public/Granted literature
- US12243754B2 Semiconductor device and a method of manufacturing the semiconductor device Public/Granted day:2025-03-04
Information query
IPC分类: