Invention Application
- Patent Title: COMPOSITION, METHOD OF PRODUCING SUBSTRATE, AND POLYMER
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Application No.: US17735151Application Date: 2022-05-03
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Publication No.: US20220259741A1Publication Date: 2022-08-18
- Inventor: Hiroyuki KOMATSU , Motohiro Shiratani
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2019-205088 20191112
- Main IPC: C23C18/06
- IPC: C23C18/06 ; C09D185/02 ; C09D185/04 ; C09D5/20 ; C23C18/12 ; C23G1/02

Abstract:
A composition includes a polymer and a solvent. The polymer includes a group (X) which is at least one selected from the group consisting of: a group including at least two cyano groups; a group including —B(OR)2; a group including —PO(OR)2; and a group including —P(OR)2. Each R independently represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. The polymer preferably includes the group (X) at an end of a main chain thereof or at an end of a side chain thereof.
Information query
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