- 专利标题: VARIABLE FREQUENCY AND NON-SINUSOIDAL POWER GENERATOR USING DOUBLE SIDE COOLING, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
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申请号: US17470337申请日: 2021-09-09
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公开(公告)号: US20220262599A1公开(公告)日: 2022-08-18
- 发明人: Hyunbae KIM , Hyunjae LEE , Youngdo KIM , Hyejin KIM , Sangki NAM , Chanhee PARK , Minho JUNG
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Sunwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Sunwon-si
- 优先权: KR10-2021-0021626 20210218
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.
公开/授权文献
- US2121134A Logging rig 公开/授权日:1938-06-21