Invention Application
- Patent Title: BACK END OF LINE (BEOL) PROCESS CORNER SENSING
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Application No.: US17180652Application Date: 2021-02-19
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Publication No.: US20220270938A1Publication Date: 2022-08-25
- Inventor: Saravanan MARIMUTHU , De LU , Baldeo Sharan SHARMA , Peeyush Kumar PARKAR , Venkat NARAYANAN , Rui LI , Samy Shafik Tawfik ZAYNOUN , Min CHEN , David KIDD , Amit PATIL
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G06F30/398

Abstract:
Aspects of the disclosure are directed to sensing integrated circuit (IC) Back End Of Line (BEOL) process corners. In one aspect, an apparatus for sensing IC BEOL process corners includes a ring oscillator including a plurality of ring oscillator stages configured to generate an output waveform with a frequency state; and a shield net circuit including a plurality of shield net stages corresponding to the plurality of ring oscillator stages, the shield net circuit having a toggle input. And, a method includes generating an output waveform with a frequency state using a ring oscillator that includes a plurality of ring oscillator stages; modifying a plurality of ring oscillator stage time delays through a coupling between a plurality of shield net stages and the plurality of ring oscillator stages; and selecting the frequency state using a toggle input of a shield net circuit which includes the plurality of shield net stages.
Public/Granted literature
- US11823962B2 Back end of line (BEOL) process corner sensing Public/Granted day:2023-11-21
Information query
IPC分类: