- 专利标题: SEMICONDUCTOR DEVICE
-
申请号: US17628296申请日: 2020-07-13
-
公开(公告)号: US20220271168A1公开(公告)日: 2022-08-25
- 发明人: Shunpei YAMAZAKI , Shinya SASAGAWA , Ryota HODO , Takashi HIROSE , Yoshihiro KOMATSU , Katsuaki TOCHIBAYASHI , Kentaro SUGAYA
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 优先权: JP2019-138038 20190726,JP2019-141556 20190731,JP2019-170999 20190920,JP2020-081763 20200507
- 国际申请: PCT/IB2020/056540 WO 20200713
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/66 ; H01L29/423
摘要:
A semiconductor device with a small variation in transistor characteristics is provided. The semiconductor device includes an oxide semiconductor, a first conductor and a second conductor over the oxide semiconductor, a first insulator in contact with a top surface of the first conductor, a second insulator in contact with a top surface of the second conductor, a third insulator which is positioned over the first insulator and the second insulator and has an opening overlapping with a region between the first conductor and the second conductor, a fourth insulator positioned over the oxide semiconductor and in the region between the first conductor and the second conductor, and a third conductor over the fourth insulator. Each of the first insulator and the second insulator is a metal oxide including an amorphous structure.
信息查询
IPC分类: