• 专利标题: FLOW RATE CONTROL VALVE AND FLOW RATE CONTROL DEVICE
  • 申请号: US17637900
    申请日: 2020-07-03
  • 公开(公告)号: US20220276664A1
    公开(公告)日: 2022-09-01
  • 发明人: Andrew PRICE
  • 申请人: HORIBA STEC, Co., Ltd.
  • 申请人地址: JP Kyoto-shi, Kyoto
  • 专利权人: HORIBA STEC, Co., Ltd.
  • 当前专利权人: HORIBA STEC, Co., Ltd.
  • 当前专利权人地址: JP Kyoto-shi, Kyoto
  • 优先权: JP2019-162379 20190905
  • 国际申请: PCT/JP2020/026251 WO 20200703
  • 主分类号: G05D7/06
  • IPC分类号: G05D7/06
FLOW RATE CONTROL VALVE AND FLOW RATE CONTROL DEVICE
摘要:
To provide a flow rate control valve that can improve responsiveness of flow rate control of a pressure differential type of a flow rate control device. The flow rate control valve is so configured to comprise a pair of valve members each of which has a seat surface being in contact with each other, to provide an internal flow channel that opens toward the seat surfaces and that passes through the inside of at least one of the valve members, and to control a flow rate of a fluid flowing out through the internal flow channel to the outside by adjusting a separation distance between the seat surfaces. And a restricted flow channel is formed in the internal flow channel so that a differential pressure is generated between an upstream side and a downstream side of the restricted flow channel.
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