Invention Application
- Patent Title: MACHINE LEARNING FOR CLASSIFYING RETAINING RINGS
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Application No.: US17678932Application Date: 2022-02-23
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Publication No.: US20220281052A1Publication Date: 2022-09-08
- Inventor: Eric Lau , Andrew J. Nagengast , Charles C. Garretson , Huanbo Zhang , Zhize Zhu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B24B37/005
- IPC: B24B37/005
Abstract:
A method for optimizing polishing includes, for each respective retaining ring of a plurality of retaining rings mounted on a particular carrier head, performing measurements for a bottom surface of the respective retaining ring mounted on the particular carrier head using a coordinate measurement machine and collecting a respective removal profile of a substrate polished using the respective retaining ring. A machine learning model is trained based on the measurements of the bottom surface of the retaining ring and the respective removal profiles.
Information query
