Invention Application
- Patent Title: MICROMECHANICAL OSCILLATION SYSTEM
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Application No.: US17634360Application Date: 2020-10-01
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Publication No.: US20220283427A1Publication Date: 2022-09-08
- Inventor: Eugene Moliere Tanguep Njiokep , Frank Schatz , Helmut Grutzeck , Stefan Pinter , Johannes Baader , Rainer Straub , Timo Schary
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Priority: DE102019216154.5 20191021
- International Application: PCT/EP2020/077493 WO 20201001
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; B81B3/00

Abstract:
A micromechanical oscillation system that is designed as a micromirror system. The micromechanical oscillation system includes a micromechanical oscillating body that includes at least one micromirror. The micromechanical oscillating body is designed to oscillate about an oscillation axis, in particular at a resonant frequency of the oscillating body. The micromechanical oscillating body has a total mass made up of mass elements. The mass elements are distributed as a function of a lateral horizontal spacing of the mass elements from the oscillation axis.
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