DISPLAY METHOD AND CONTROL DEVICE
Abstract:
A display method includes storing, in a storage unit, first history information in which a processing is executed by a substrate processing apparatus based on a recipe; storing, in the storage unit, second history information in which an execution instruction for a job is received to instruct execution of the processing; and calculating, based on the first history information and the second history information, a first idle time indicating a time during which the processing is not performed and a second idle time indicating a time from an end of the job to a start of execution of a next job, and displaying the first idle time and the second idle time.
Information query
Patent Agency Ranking
0/0