Invention Application
- Patent Title: DISPLAY METHOD AND CONTROL DEVICE
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Application No.: US17678477Application Date: 2022-02-23
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Publication No.: US20220283572A1Publication Date: 2022-09-08
- Inventor: Ryota AOI
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2021-033651 20210303
- Main IPC: G05B19/418
- IPC: G05B19/418 ; G06F3/04847 ; H01J37/32 ; C23C16/52

Abstract:
A display method includes storing, in a storage unit, first history information in which a processing is executed by a substrate processing apparatus based on a recipe; storing, in the storage unit, second history information in which an execution instruction for a job is received to instruct execution of the processing; and calculating, based on the first history information and the second history information, a first idle time indicating a time during which the processing is not performed and a second idle time indicating a time from an end of the job to a start of execution of a next job, and displaying the first idle time and the second idle time.
Information query
IPC分类: