公开(公告)号：US20240020899A1

公开(公告)日：2024-01-18

申请号：US18218450

申请日：2023-07-05

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI ,  Kenichi KOBAYASHI

IPC: G06T13/00 ,  G06T11/20 ,  G08B29/00

CPC classification number: G06T13/00 ,  G06T11/206 ,  G08B29/00

Abstract: A display method includes acquiring history information of data, including sensor data detecting a state of a substrate processing apparatus and image data displaying the state of the substrate processing apparatus, from a plurality of pieces of data managed by the substrate processing apparatus; acquiring alarm information including a date and time of occurrence at which a specific event occurred in the substrate processing apparatus; determining, as trace information to be displayed, sensor data for a specific period including the date and time of occurrence included in the alarm information, among the history information of the data; determining, as video image information to be displayed, image data for the specific period including the date and time of occurrence included in the alarm information, among the history information of the data; and displaying, on a display, at least one of the trace information and the video image information.

公开(公告)号：US20230394090A1

公开(公告)日：2023-12-07

申请号：US18201869

申请日：2023-05-25

Applicant: Tokyo Electron Limited

Inventor： Kakeru HIRATOKO ,  Ryota AOI ,  Takehiro KINOSHITA

IPC: G06F16/9038 ,  G06F16/903

CPC classification number: G06F16/9038 ,  G06F16/90335 ,  G06F3/04842

Abstract: An information processing apparatus includes: a data acquisition unit that acquires specific data including the number of selections and selection date/time for each data selected for indicating the apparatus status, and a set of data and the number of selections of the set when multiple data are selected; a calculation unit that calculates a specific indicator by using at least one of the specific data; and a display controller that displays selection candidate data based on the specific indicator. The calculation unit executes at least one of: calculating a first indicator based on the number of selections for each data; calculating a second indicator based on selection date/time of each data; and calculating a third indicator based on the number of selections for each set of data. The display controller takes the first, second, and/or third indicators as the specific indicator, and displays the selection candidate data.

公开(公告)号：US20210018905A1

公开(公告)日：2021-01-21

申请号：US16926944

申请日：2020-07-13

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI ,  Yasuhiko OKADA ,  Yoshitaka ENOKI ,  Kakeru HIRATOKO

IPC: G05B23/02

Abstract: A state management system includes: an acquisition unit that acquires data accumulated in an apparatus; an execution unit that executes a process of combining a plurality of types of data selected in advance among the acquired data and calculating one index indicating a normality of the apparatus at predetermined intervals; and a display controller that displays the calculated one index in a display.

公开(公告)号：US20230297056A1

公开(公告)日：2023-09-21

申请号：US18118546

申请日：2023-03-07

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI ,  Yoshitaka ENOKI ,  Yasuhiko OKADA

IPC: G05B19/042

CPC classification number: G05B19/0428

Abstract: An information processing apparatus includes: an operation status data collecting unit that collects operation status data of a plurality of heat treatment apparatuses installed in a manufacturing plant; an operation status data storing unit that stores the operation status data for each of the plurality of heat treatment apparatuses; and an operation status data providing unit that provides list information of the operation status data for each of the plurality of heat treatment apparatuses stored in the operation status data storing unit, as information that supports restoration of the plurality of heat treatment apparatuses when operations of the plurality of heat treatment apparatuses are forcibly stopped.

公开(公告)号：US20220283572A1

公开(公告)日：2022-09-08

申请号：US17678477

申请日：2022-02-23

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI

IPC: G05B19/418 ,  G06F3/04847 ,  H01J37/32 ,  C23C16/52

Abstract: A display method includes storing, in a storage unit, first history information in which a processing is executed by a substrate processing apparatus based on a recipe; storing, in the storage unit, second history information in which an execution instruction for a job is received to instruct execution of the processing; and calculating, based on the first history information and the second history information, a first idle time indicating a time during which the processing is not performed and a second idle time indicating a time from an end of the job to a start of execution of a next job, and displaying the first idle time and the second idle time.

公开(公告)号：US20240427317A1

公开(公告)日：2024-12-26

申请号：US18747506

申请日：2024-06-19

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI ,  Kenichi KOBAYASHI

IPC: G05B19/418 ,  H01L21/67

Abstract: A control device for controlling a semiconductor manufacturing apparatus including a local operation terminal displaying an apparatus screen of the semiconductor manufacturing apparatus and one or more remote operation terminals displaying the apparatus screen, includes: a login state management unit that manages the local operation terminal and at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus; and a communication unit that provides a function of posting and browsing a message between a first user operating the local operation terminal and a second user operating the at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus, by transmitting screen data enabling the posting and browsing of the message to the local operation terminal and the at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus.

公开(公告)号：US20230288917A1

公开(公告)日：2023-09-14

申请号：US18118582

申请日：2023-03-07

Applicant: Tokyo Electron Limited

Inventor： Ryota AOI

IPC: G05B19/418 ,  G05B23/02

CPC classification number: G05B19/4183 ,  G05B23/0272 ,  G05B2219/2602

Abstract: A state management system includes an acquisition unit configured to acquire cumulative data, an execution unit configured to execute, in each cycle, a processing of calculating a specific index indicating a state of the apparatus using a plurality of types of data among the acquired data, and a display control unit configured to display time-series data indicating a time-series change in the calculated specific index. The processing executed by the execution unit includes at least one of calculating a first index indicating a degree of normality of the apparatus, calculating a second index indicating a rate at which the apparatus was in the operable state, and calculating a third index indicating productivity of the apparatus. The display control unit displays the time-series data having the first index, the second index, and/or the third index as the specific index.

公开(公告)号：US20220291035A1

公开(公告)日：2022-09-15

申请号：US17692338

申请日：2022-03-11

Applicant: Tokyo Electron Limited

Inventor： Takashi ASAKAWA ,  Satoshi TANAKA ,  Ryota AOI

IPC: G01F15/06

Abstract: An aggregation method includes: acquiring log information including a measurement value of a force used by a processing apparatus and a measurement date and time, the measurement value being measured by a sensor of the processing apparatus that processes a substrate; storing the measurement value of the force and the measurement date and time included in the acquired log information in a storage unit; and integrating the measurement value of the force associated with the measurement date and time in a specified aggregation period with reference to the storage unit to calculate an integrated value of the force for each processing apparatus.