Invention Application
- Patent Title: Apparatus For Fiber Optic Temperature Probe In Processing Chambers
-
Application No.: US17684903Application Date: 2022-03-02
-
Publication No.: US20220285140A1Publication Date: 2022-09-08
- Inventor: Marcus Blake Freitas , David Masayuki Ishikawa , Vijay D. Parkhe , Visweswaren Sivaramakrishnan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G01K11/32 ; G01K1/14
Abstract:
Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.
Public/Granted literature
- US12057298B2 Apparatus for fiber optic temperature probe in processing chambers Public/Granted day:2024-08-06
Information query
