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公开(公告)号：US12057298B2
公开(公告)日：2024-08-06
申请号：US17684903
申请日：2022-03-02
发明人： Marcus Blake Freitas , David Masayuki Ishikawa , Vijay D. Parkhe , Visweswaren Sivaramakrishnan
CPC分类号： H01J37/32724 , G01K1/14 , G01K11/32
摘要： Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.
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公开(公告)号：US20220285140A1
公开(公告)日：2022-09-08
申请号：US17684903
申请日：2022-03-02
发明人： Marcus Blake Freitas , David Masayuki Ishikawa , Vijay D. Parkhe , Visweswaren Sivaramakrishnan
摘要： Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.
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