公开(公告)号：US12057298B2

公开(公告)日：2024-08-06

申请号：US17684903

申请日：2022-03-02

Applicant: Applied Materials, Inc.

Inventor： Marcus Blake Freitas ,  David Masayuki Ishikawa ,  Vijay D. Parkhe ,  Visweswaren Sivaramakrishnan

IPC: H01J37/32 ,  G01K1/14 ,  G01K11/32

CPC classification number: H01J37/32724 ,  G01K1/14 ,  G01K11/32

Abstract: Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.

公开(公告)号：US20220285140A1

公开(公告)日：2022-09-08

申请号：US17684903

申请日：2022-03-02

Applicant: Applied Materials, Inc.

Inventor： Marcus Blake Freitas ,  David Masayuki Ishikawa ,  Vijay D. Parkhe ,  Visweswaren Sivaramakrishnan

IPC: H01J37/32 ,  G01K11/32 ,  G01K1/14

Abstract: Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.