Invention Application
- Patent Title: MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US17190576Application Date: 2021-03-03
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Publication No.: US20220285385A1Publication Date: 2022-09-08
- Inventor: Erh-Kun LAI
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/06 ; H01L21/764

Abstract:
A memory device and a method for fabricating the memory device are provided. The memory device includes a substrate having an upper surface; a stack disposed on the substrate, wherein the stack includes a first insulating layer, a first conductive layer, a second insulating layer, a second conductive layer, and a third insulating layer sequentially stacked on the upper surface of the substrate along a first direction; a channel layer penetrating the stack along the first direction, wherein the channel layer has a ring shape along a cross section view in a plane perpendicular to the first direction; and a memory layer disposed between the channel layer and the second conductive layer.
Information query
IPC分类: