Invention Application
- Patent Title: SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
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Application No.: US17467129Application Date: 2021-09-03
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Publication No.: US20220288649A1Publication Date: 2022-09-15
- Inventor: Yosuke MARUYAMA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-039054 20210311
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B13/00 ; B05B13/04

Abstract:
According to an embodiment, a substrate cleaning device includes a processing tank, at least one spray tube, and a scanning mechanism. The processing tank can accommodate a plurality of substrates arranged in a thickness direction of the substrates. The spray tube extends in the thickness direction and is configured to emit a cleaning liquid to each substrate accommodated in the processing tank. The scanning mechanism is configured to move the spray tube along an outer periphery of the substrate to perform a scan.
Public/Granted literature
- US11806763B2 Substrate cleaning device and substrate cleaning method Public/Granted day:2023-11-07
Information query
IPC分类: