Invention Application
- Patent Title: INDIUM-GALLIUM-NITRIDE LIGHT EMITTING DIODES WITH INCREASED RED-LIGHT QUANTUM EFFICIENCY
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Application No.: US17197493Application Date: 2021-03-10
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Publication No.: US20220293821A1Publication Date: 2022-09-15
- Inventor: Michael Chudzik , Michel Khoury , Max Batres
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/22 ; H01L33/00

Abstract:
Exemplary processing methods of forming a semiconductor structure may include forming a nucleation layer on a semiconductor substrate. The methods may further include forming first, second, and third, gallium-and-nitrogen-containing regions on the nucleation layer. The first gallium-and-nitrogen-containing region may be porosified, without porosifying the second and third gallium-and-nitrogen containing regions. The methods may still further include forming a first active region on the porosified first gallium-and-nitrogen-containing region, and a second active region on the unporosified second gallium-and-nitrogen-containing region. The methods may yet also include forming a third active region on the unporosified third gallium- and-nitrogen-containing region.
Public/Granted literature
- US11837683B2 Indium-gallium-nitride light emitting diodes with increased red-light quantum efficiency Public/Granted day:2023-12-05
Information query
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