Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
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Application No.: US17472470Application Date: 2021-09-10
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Publication No.: US20220301869A1Publication Date: 2022-09-22
- Inventor: Masahiro KOIKE , Masao SHINGU , Masaya ICHIKAWA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-047984 20210322
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/11519 ; H01L27/11524 ; H01L27/11565 ; H01L27/1157 ; H01L29/26

Abstract:
A semiconductor memory device includes a first conductive layer, a semiconductor layer extending in a first direction and being opposed to the first conductive layer, and a gate insulating film disposed between the first conductive layer and the semiconductor layer. The first conductive layer includes a first region, a second region disposed between the first region and the gate insulating film, and a third region disposed between the first region and the first interlayer insulating layer. The first to the third regions contain a metal. The third region contains silicon (Si). The first region does not contain silicon (Si) or has a lower silicon (Si) content than a silicon (Si) content in the third region. The second region does not contain silicon (Si) or has a lower silicon (Si) content than the silicon (Si) content in the third region.
Public/Granted literature
- US11915928B2 Semiconductor memory device and method of manufacturing the same Public/Granted day:2024-02-27
Information query
IPC分类: