Invention Application
- Patent Title: BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD
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Application No.: US17636455Application Date: 2020-08-12
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Publication No.: US20220302077A1Publication Date: 2022-09-22
- Inventor: Takashi Terada , Takayuki Ishii
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2019-153201 20190823
- International Application: PCT/JP2020/030700 WO 20200812
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683 ; H01L21/66

Abstract:
A bonding apparatus includes a first holder configured to hold a first substrate divided into multiple chips with a tape and a ring frame therebetween, the first substrate being attached to the tape, and an edge of the tape being attached to the ring frame; a second holder configured to hold a second substrate, which is disposed on an opposite side to the tape with respect to the first substrate therebetween, while maintaining a distance from the first substrate; and a pressing device configured to press the multiple chips one by one with the tape therebetween to press and bond the corresponding chip to the second substrate.
Information query
IPC分类: