Invention Application

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Abstract:
A transducer includes a base, beams, and a coupler. The beams each include a piezoelectric layer, a first electrode layer, and a second electrode layer. The coupler is fitted in slits between adjacent beams to define a connection between the beams. The coupler extends from an upper portion of the base into each of the slits without a break. A Young's modulus of the material of the coupler is lower than a Young's modulus of the material of the piezoelectric layer. A maximum thickness of the coupler in the upper portion of the base in the direction of the central axis of the base is greater than a thickness of each of the beams.
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