公开(公告)号：US20250026631A1

公开(公告)日：2025-01-23

申请号：US18910213

申请日：2024-10-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi MATSUBARA ,  Shinsuke IKEUCHI ,  Ryosuke NIWA ,  Gou SAITOU

IPC: B81B7/00 ,  B81C1/00 ,  H10N30/045

Abstract: A MEMS device is provided that includes a piezoelectric element including a piezoelectric membrane including a ferroelectric and configured to vibrate based on an application of a voltage. A device may include a diode portion electrically connected in parallel to the piezoelectric element and including a diode.

公开(公告)号：US20220384708A1

公开(公告)日：2022-12-01

申请号：US17883742

申请日：2022-08-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/187

Abstract: In a piezoelectric device, a layered portion includes, at a position at least above a recess, a single crystal piezoelectric layer and a pair of electrode layers to apply voltage to the single crystal piezoelectric layer. At least a portion of the pair of electrode layers includes a lower electrode layer extending along a surface of the single crystal piezoelectric layer, the surface being closer to a base. The lower electrode layer is present only inside the recess.

公开(公告)号：US20220209098A1

公开(公告)日：2022-06-30

申请号：US17694730

申请日：2022-03-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA

IPC: H01L41/09 ,  H01L41/047 ,  H01L41/187 ,  H01L41/29 ,  H01L41/332

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a connecting electrode. The piezoelectric layer includes first and second surfaces, and a through-hole. The second electrode layer is adjacent to the second surface of the piezoelectric layer. The second electrode layer faces the through-hole. The second electrode layer includes silicon as a major component. The connecting electrode is on a connecting surface of the second electrode layer, and the connecting surface faces the through-hole. The connecting electrode is made of a metal. A surface roughness of the connecting surface is greater than a surface roughness of a major surface. The major surface is a portion, other than the connecting surface, of a surface of the second electrode layer, and the surface is adjacent to the piezoelectric layer.

公开(公告)号：US20220209095A1

公开(公告)日：2022-06-30

申请号：US17694729

申请日：2022-03-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Masato KOBAYASHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/312 ,  H01L41/187

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, and a second electrode layer. The piezoelectric layer includes first and second surfaces opposed to each other. The first electrode layer is located on the first surface. The second electrode layer is located on the second surface. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer mainly includes silicon. The piezoelectric layer is monocrystalline.

公开(公告)号：US20200168785A1

公开(公告)日：2020-05-28

申请号：US16777925

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Tetsuya KIMURA ,  Katsumi FUJIMOTO ,  Yutaka KISHIMOTO ,  Fumiya KUROKAWA ,  Yuzo KISHI

IPC: H01L41/047 ,  H01L41/297 ,  H01L41/08 ,  H01L41/09 ,  H01L41/083 ,  H01L41/053

Abstract: A piezoelectric device includes a piezoelectric body at least a portion of which can bend and vibrate, an upper electrode on an upper surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, a lower electrode on a lower surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, and a support substrate below the piezoelectric body, in which a recess extending from a lower surface of the support substrate toward the lower surface of the piezoelectric device is provided.

公开(公告)号：US20220271728A1

公开(公告)日：2022-08-25

申请号：US17685437

申请日：2022-03-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17

Abstract: A piezoelectric element includes a second electrode layer on a second surface of a single-crystal piezoelectric layer. A hole continuous with a through-hole is provided in the second electrode layer. The second electrode layer is made of Pt, Ti, Al, Cu, Au, Ag, Mg, or an alloy including at least one of the metals as a main ingredient. A third electrode layer is on one side of the second electrode layer opposite to the single-crystal piezoelectric layer. The third electrode layer includes at least a portion outside of an edge of the hole with a distance maintained relative to the edge of the hole when viewed in a direction perpendicular or substantially perpendicular to the second surface. The third electrode layer is made of Ni or an alloy including Ni as a main ingredient.

公开(公告)号：US20220246830A1

公开(公告)日：2022-08-04

申请号：US17724528

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Seiji UMEZAWA ,  Fumiya KUROKAWA ,  Masayuki SUZUKI

IPC: H01L41/09 ,  H01L41/047

Abstract: In a piezoelectric device, a cantilever portion includes a fixed edge portion and a free edge portion. A plate-shaped portion includes a facing edge portion, a support edge portion, a first lateral support edge portion, and a second lateral support edge portion. The facing edge portion faces the free edge portion. The support edge portion is on an opposite side from the facing edge portion in an extension direction of the cantilever portion. The plate-shaped portion is connected to an inner surface at at least a portion of the support edge portion, at least a portion of the first lateral support edge portion, and at least a portion of the second lateral support edge portion.

公开(公告)号：US20220199891A1

公开(公告)日：2022-06-23

申请号：US17691488

申请日：2022-03-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki SUZUKI ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA ,  Masato KOBAYASHI

IPC: H01L41/047 ,  H01L41/187 ,  H01L41/332 ,  H01L41/313 ,  H01L41/293 ,  H01L41/297

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a coupling electrode. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer includes a coupling area. The coupling area meets a through hole in a region of the second electrode layer not facing the first electrode layer. The coupling electrode is on the coupling area. Between the coupling area and the surface of the second electrode layer on the piezoelectric layer side excluding the coupling area, the difference in position is about 5 nm or less.

公开(公告)号：US20210343929A1

公开(公告)日：2021-11-04

申请号：US17368907

申请日：2021-07-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI

IPC: H01L41/09 ,  H01L41/047 ,  H01L41/187 ,  H01L41/312 ,  H01L41/332

Abstract: In a piezoelectric device, a piezoelectric driving portion includes layers and is directly or indirectly supported by a base portion. The piezoelectric driving portion includes a piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is disposed on the upper side of the piezoelectric layer. The lower electrode layer faces at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. The piezoelectric driving portion includes a through groove extending through the piezoelectric driving portion in the vertical direction, so that a pair of inner side surfaces are provided. The pair of inner side surfaces each include a first small-width portion in which the width of the through groove decreases in a downward direction from an upper end surface of the piezoelectric layer.

公开(公告)号：US20180239218A1

公开(公告)日：2018-08-23

申请号：US15960666

申请日：2018-04-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Katsumi FUJIMOTO ,  Masanobu NOMURA ,  Kenji NISHIYAMA

IPC: G03B5/00 ,  G02B27/00 ,  H02N2/00 ,  H04N5/232

CPC classification number: G03B5/00 ,  G02B27/0006 ,  G03B17/02 ,  G03B17/08 ,  G03B2205/0061 ,  H02N2/002 ,  H04N5/22521 ,  H04N5/2253 ,  H04N5/23216 ,  H04N5/23287 ,  H04N5/23296

Abstract: A vibrating device includes a tubular vibrating body and a lens cover coupled to a first surface of the tubular vibrating body. The tubular vibrating body includes a tubular member and piezoelectric vibrators. The lens cover includes a mode changing coupler and a light transmitting body unit disposed in front of a lens of a camera. The mode changing coupler includes a thin portion having a thickness smaller than a thickness of the tubular member.