公开(公告)号：US20220246830A1

公开(公告)日：2022-08-04

申请号：US17724528

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Seiji UMEZAWA ,  Fumiya KUROKAWA ,  Masayuki SUZUKI

IPC: H01L41/09 ,  H01L41/047

Abstract: In a piezoelectric device, a cantilever portion includes a fixed edge portion and a free edge portion. A plate-shaped portion includes a facing edge portion, a support edge portion, a first lateral support edge portion, and a second lateral support edge portion. The facing edge portion faces the free edge portion. The support edge portion is on an opposite side from the facing edge portion in an extension direction of the cantilever portion. The plate-shaped portion is connected to an inner surface at at least a portion of the support edge portion, at least a portion of the first lateral support edge portion, and at least a portion of the second lateral support edge portion.

公开(公告)号：US20220329951A1

公开(公告)日：2022-10-13

申请号：US17853979

申请日：2022-06-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji UMEZAWA ,  Matti LIUKKU ,  Ville-Pekka RYTKÖNEN ,  Anssi BLOMQVIST ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Masayuki SUZUKI

IPC: H04R17/02

Abstract: A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.

公开(公告)号：US20220246831A1

公开(公告)日：2022-08-04

申请号：US17724759

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Seiji UMEZAWA ,  Masayuki SUZUKI

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/187 ,  B06B1/06 ,  H01L41/047

Abstract: A piezoelectric device includes a beam portion with a fixed end portion and a free end portion opposite to the fixed end portion. The beam portion extends from the fixed end portion towards the free end portion. The beam portion includes a multilayer body including a piezoelectric layer and first and second electrode layers. A base is connected with the fixed end portion of the beam portion. As viewed from a layering direction of the multilayer body, the base surrounds the beam portion at an interval from the beam portion except for the fixed end portion. As viewed from the layering direction, an average of a dimension of a width of the beam portion in an orthogonal or substantially orthogonal direction to an extension direction of the beam portion is greater than a maximal dimension of a length thereof in the extension direction.

公开(公告)号：US20210193901A1

公开(公告)日：2021-06-24

申请号：US17192940

申请日：2021-03-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji UMEZAWA ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Nobuyoshi ADACHI ,  Yoichi MOCHIDA

IPC: H01L41/09 ,  H01L41/047 ,  H01L41/187

Abstract: A piezoelectric transducer includes beam portions supported by a base portion at an end portion and extending in a direction away from the base portion above the base portion. Each beam portion includes a piezoelectric layer, an upper electrode layer on an upper side of the piezoelectric layer, and a lower electrode layer facing at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. A fixing portion is disposed on the beam portion to sandwich the end portion of each beam portion between the fixing portion and the base portion. The fixing portion overlaps at least a portion of the base portion in an up-down direction, and extends to protrude from the base portion in an extending direction of the beam portion.

公开(公告)号：US20230199405A1

公开(公告)日：2023-06-22

申请号：US18109900

申请日：2023-02-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji UMEZAWA ,  Shinsuke IKEUCHI ,  Masayuki SUZUKI ,  Matti LIUKKU ,  Ville-Pekka RYTKÖNEN ,  Anssi BLOMQVIST ,  Ville KAAJAKARI

IPC: H04R17/02

CPC classification number: H04R17/02

Abstract: A transducer includes a first connection portion connecting a first tip and a second tip to each other. The first connection portion is surrounded by a split slit connecting a center of the first tip, a center of a base, and a center of the second tip, the first tip, and the second tip.

公开(公告)号：US20230038607A1

公开(公告)日：2023-02-09

申请号：US17967931

申请日：2022-10-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji UMEZAWA ,  Shinsuke IKEUCHI ,  Masayuki SUZUKI ,  Matti LIUKKU ,  Ville-Pekka RYTKÖNEN ,  Anssi BLOMQVIST ,  Ville KAAJAKARI

IPC: H01L41/09 ,  B06B1/06 ,  H01L41/18 ,  H01L41/047

Abstract: A piezoelectric device includes a connection section including a first coupling portion, a second coupling portion, and a bridging portion. The first coupling portion extends along a slit and is connected to one of a pair of beam sections. The second coupling portion extends along the slit and is connected to another of the pair of beam sections. The bridging portion is located between the slit and an opening and is connected to both of the first coupling portion and the second coupling portion. The beam sections are connected to each other in a circumferential direction of a base having an annular shape via the connecting section while each of the beam sections is interposed between the slits extending in intersecting directions.

公开(公告)号：US20220401994A1

公开(公告)日：2022-12-22

申请号：US17894217

申请日：2022-08-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya KUROKAWA ,  Yasuhiro AIDA ,  Shinsuke IKEUCHI ,  Seiji UMEZAWA ,  Masayuki SUZUKI

IPC: B06B1/02 ,  G10K11/02

Abstract: An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

公开(公告)号：US20220303693A1

公开(公告)日：2022-09-22

申请号：US17830501

申请日：2022-06-02

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Seiji UMEZAWA ,  Masayuki SUZUKI ,  Fumiya KUROKAWA

IPC: H04R17/02

Abstract: A transducer includes a base, beams, and a coupler. The beams each include a piezoelectric layer, a first electrode layer, and a second electrode layer. The coupler is fitted in slits between adjacent beams to define a connection between the beams. The coupler extends from an upper portion of the base into each of the slits without a break. A Young's modulus of the material of the coupler is lower than a Young's modulus of the material of the piezoelectric layer. A maximum thickness of the coupler in the upper portion of the base in the direction of the central axis of the base is greater than a thickness of each of the beams.

公开(公告)号：US20210202824A1

公开(公告)日：2021-07-01

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya KUROKAWA ,  Shinsuke IKEUCHI ,  Yoichi MOCHIDA ,  Seiji UMEZAWA ,  Nobuyoshi ADACHI ,  Yutaka KISHIMOTO

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.