Invention Application
- Patent Title: DESIGN PATTERN GENERATION METHOD, TEMPLATE, AND METHOD FOR MANUFACTURING TEMPLATE
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Application No.: US17472334Application Date: 2021-09-10
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Publication No.: US20220308456A1Publication Date: 2022-09-29
- Inventor: Kazuhiro TAKAHATA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-048272 20210323
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G06F30/10 ; G06F30/20

Abstract:
A design pattern generation method of an embodiment is a method for generating a design pattern of a template. The design pattern generation method includes: generating an actual pattern including a first pattern protruding from a contact surface of the template with a material layer and extending in a predetermined direction along the contact surface, and a second pattern further protruding from an upper surface of the first pattern; calculating a volume of the first pattern and the second pattern per unit area on the contact surface; and adding, when a difference in the volume of the first pattern and the second pattern per unit area between regions on the contact surface exceeds a specified value, a third pattern to a region where the volume of the first pattern and the second pattern per unit area is small.
Public/Granted literature
- US12204251B2 Pattern generation method, template, and method for manufacturing template Public/Granted day:2025-01-21
Information query
IPC分类: