Invention Application
- Patent Title: GATE CONTACT STRUCTURE FOR A TRENCH POWER MOSFET WITH A SPLIT GATE CONFIGURATION
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Application No.: US17694276Application Date: 2022-03-14
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Publication No.: US20220320332A1Publication Date: 2022-10-06
- Inventor: Yean Ching YONG , Maurizio Gabriele CASTORINA , Voon Cheng NGWAN , Ditto ADNAN , Fadhillawati TAHIR , Churn Weng YIM
- Applicant: STMicroelectronics Pte Ltd
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd
- Current Assignee: STMicroelectronics Pte Ltd
- Current Assignee Address: SG Singapore
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/40 ; H01L21/764 ; H01L21/765 ; H01L29/66

Abstract:
An integrated circuit transistor device includes a semiconductor substrate providing a drain, a first doped region buried in the semiconductor substrate providing a body and a second doped region in the semiconductor substrate providing a source. A trench extends into the semiconductor substrate and passes through the first and second doped regions. An insulated polygate region within the trench surrounds a polyoxide region that may have void inclusion. The polygate region is formed by a first gate lobe and second gate lobe on opposite sides of the polyoxide region. A pair of gate contacts are provided at each trench. The pair of gate contacts includes: a first gate contact extending into the first gate lobe at a location laterally offset from the void and a second gate contact extending into the second gate lobe at a location laterally offset from the void.
Public/Granted literature
- US12224342B2 Gate contact structure for a trench power MOSFET with a split gate configuration Public/Granted day:2025-02-11
Information query
IPC分类: