Invention Application
- Patent Title: ACOUSTIC WAVE DEVICE
-
Application No.: US17706723Application Date: 2022-03-29
-
Publication No.: US20220321097A1Publication Date: 2022-10-06
- Inventor: Hisashi YAMAZAKI , Seiji KAI , Takeshi NAKAO
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/13 ; H03H9/02

Abstract:
An acoustic wave device includes a support including a support substrate, a piezoelectric layer on the support, a functional electrode at the piezoelectric layer, a frame-shaped support frame on the piezoelectric layer and surrounding the functional electrode in a plan view in a stacking direction of the support and the piezoelectric layer, and a lid covering an opening of the support frame, wherein the support includes a first cavity at a position overlapping at least a portion of the functional electrode in the plan view, a second cavity defined by the piezoelectric layer, the support frame, and the lid between the piezoelectric layer and the lid, the piezoelectric layer includes a through hole communicating with the first and second cavities, and the first and second cavities are under vacuum.
Information query
IPC分类: