Invention Application
- Patent Title: LASER PROCESSING DEVICE, AND LASER PROCESSING METHOD
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Application No.: US17641545Application Date: 2020-09-09
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Publication No.: US20220331902A1Publication Date: 2022-10-20
- Inventor: Takafumi OGIWARA , Yasunori IGASAKI
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2019-165703 20190911
- International Application: PCT/JP2020/034184 WO 20200909
- Main IPC: B23K26/067
- IPC: B23K26/067 ; B23K26/06

Abstract:
A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, and a controller. The controller controls the spatial light modulator so that laser light is branched into a plurality of rays of processing light including 0th-order light and a plurality of converging points for the plurality of rays of processing light are located at positions different from each other in a Z direction and an X direction, and controls at least one of the support part and the converging part so that the X direction coincides with an extension direction of a line and the plurality of converging points move relatively along the line. The controller controls the spatial light modulator so that a converging point of the 0th-order light is located one side with respect to a converging point of non-modulated light of the laser light, in the X direction.
Information query
IPC分类: