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1.发明申请公开(公告)号：US20220055156A1
公开(公告)日：2022-02-24
申请号：US17414668
申请日：2019-12-18
Applicant: National University Corporation Tokai National Higher Education and Research System , HAMAMATSU PHOTONICS K.K.
Inventor： Atsushi TANAKA , Chiaki SASAOKA , Hiroshi AMANO , Daisuke KAWAGUCHI , Yotaro WANI , Yasunori IGASAKI , Toshiki YUI
Abstract: There is provided a laser processing method for cutting a semiconductor object along a virtual plane facing a surface of the semiconductor object in the semiconductor object. The laser processing method includes a first step of forming a plurality of first modified spots along the virtual plane to obtain first formation density, by causing laser light to enter into the semiconductor object from the surface, and a second step of forming a plurality of second modified spots along the virtual plane so as to obtain second formation density higher than the first formation density, by causing laser light to enter into the semiconductor object from the surface after the first step.
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公开(公告)号：US20220390757A1
公开(公告)日：2022-12-08
申请号：US17779300
申请日：2020-11-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yotaro WANI , Yasunori IGASAKI
IPC: G02B27/28 , B23K26/53 , B23K26/046
Abstract: There is provided a laser processing device that performs laser processing on an object made of a birefringent material, the device including: a light source that outputs laser light; a spatial light modulator that modulates the laser light output from the light source; a focusing lens that focuses the laser light toward the object; and a polarized light component control unit that is a function of the spatial light modulator to control polarized light components of the laser light such that the laser light is focused on one point in the object in a Z direction (optical axis direction).
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公开(公告)号：US20190126393A1
公开(公告)日：2019-05-02
申请号：US16083066
申请日：2017-03-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasunori IGASAKI , Aiko NAKAGAWA
IPC: B23K26/064 , B23K26/00 , B23K26/03 , B23K26/08 , B23K26/53 , B23K26/70 , H01L21/67 , H01L21/268 , H01L21/78 , H01L41/338
Abstract: A laser light irradiation device includes: a laser light source; a spatial light modulator including a display unit configured to display a phase pattern; an objective lens configured to condense a laser light emitted from the spatial light modulator at the object; an image-transfer optical system configured to transfer an image of the laser light on the display unit to an entrance pupil plane of the objective lens; a reflected light detector configured to detect reflected light of the laser light which is incident in the object and reflected by an opposite surface opposite to a laser light entrance surface; and a controller configured to control the phase pattern. When the reflected light detector detects the reflected light, the controller displays a reflected light aberration correction pattern which is the phase pattern correcting aberration generated in the event of the laser light being transmitted through the object having twice the predetermined thickness.
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公开(公告)号：US20170216973A1
公开(公告)日：2017-08-03
申请号：US15314182
申请日：2015-03-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takeshi SAKAMOTO , Yasunori IGASAKI , Mamiko MATSUNAGA
IPC: B23K26/53 , B23K26/067 , B23K26/066
Abstract: A laser processing device includes: a laser light source emitting laser light; a converging optical system converging the laser light at an object to be processed; a reflective spatial light modulator modulating the laser light such that the laser light is caused to branch into 0th order light and ±nth order light (n is a natural number) including at least first processing light and second processing light, and the first processing light is converged at a first converging point and the second processing light is converged at a second converging point; and a light blocking part blocking light to be converged at an outside with respect to the first processing light and the second processing light of the 0th order light and the ±nth order light to be converged at the object.
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5.发明申请公开(公告)号：US20220093463A1
公开(公告)日：2022-03-24
申请号：US17414428
申请日：2019-12-18
Applicant: National University Corporation Tokai National Higher Education and Research System , HAMAMATSU PHOTONICS K.K.
Inventor： Atsushi TANAKA , Chiaki SASAOKA , Hiroshi AMANO , Daisuke KAWAGUCHI , Yotaro WANI , Yasunori IGASAKI
IPC: H01L21/78 , B23K26/53 , H01L21/304 , H01L21/67
Abstract: There is provided a laser processing method for cutting a semiconductor object along a virtual plane facing a surface of the semiconductor object in the semiconductor object. The laser processing method includes a first step of forming a plurality of first modified spots along the virtual plane by causing laser light to enter into the semiconductor object from the surface, and a second step of forming a plurality of second modified spots along the virtual plane so as not to overlap the plurality of first modified spots, by causing laser light to enter into the semiconductor object from the surface.
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Patent Agency Ranking
公开(公告)号：US20200047283A1
公开(公告)日：2020-02-13
申请号：US16341605
申请日：2017-10-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasunori IGASAKI
IPC: B23K26/073 , B23K26/40 , B23K26/04
Abstract: There is provided a laser processing device that includes a laser light source configured to output laser light, a spatial light modulator configured to modulate the laser light output from the laser light source according to a phase pattern and emit the modulated laser light, an objective lens configured to converge the laser light emitted from the spatial light modulator onto an object, a controller configured to control a phase pattern to be displayed on the spatial light modulator, and a determiner configured to determine whether operation of the spatial light modulator is normal, in which the controller performs switching control in which the phase pattern to be displayed on the spatial light modulator is switched, and the determiner makes the determination on the basis of a change in intensity of the laser light emitted from the spatial light modulator between before the switching control and after the switching control.
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公开(公告)号：US20190084089A1
公开(公告)日：2019-03-21
申请号：US16082982
申请日：2017-03-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasunori IGASAKI , Aiko NAKAGAWA , Takeshi YAMADA
Abstract: A laser machining device includes a laser light source, a spatial light modulator which includes a display unit, an objective lens, an image-transfer optical system, a camera and a controller. The controller executes first display processing and second display processing. According to first display processing, when the camera captures the image, the display unit displays a first phase pattern for adjusting a condensing position of laser light condensed by the objective lens to a first condensing position. According to second display processing, when the camera captures the image, the display unit displays a second phase pattern for adjusting the condensing position of the laser light condensed by the objective lens to a second condensing position different from the first condensing position in an irradiation direction of the laser light.
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公开(公告)号：US20170199083A1
公开(公告)日：2017-07-13
申请号：US15331036
申请日：2016-10-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Junji OKUMA , Yasunori IGASAKI , Yasunaga NARA
IPC: G01J9/02
CPC classification number: G01J9/0215 , G01J2009/0223 , G01J2009/0234
Abstract: A collimation evaluation device includes a first reflection member, a second reflection member, a screen, and a housing. A first reflection surface of the first reflection member and a first reflection surface of the second reflection member face each other and are parallel to each other. Further, interference fringes are formed on the screen by light L12 reflected on the first reflection surface of the first reflection member and a second reflection surface of the second reflection member and light L21 reflected on a second reflection surface of the first reflection member and the first reflection surface of the second reflection member, and collimation of incident light is evaluated on the basis of a direction of the interference fringes.
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公开(公告)号：US20230324550A1
公开(公告)日：2023-10-12
申请号：US18104326
申请日：2023-02-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori NAKAMURA , Kenichiro IKEMURA , Koji TAKAHASHI , Yasunori IGASAKI
CPC classification number: G01S17/32 , G01S7/4808 , G01S7/4811
Abstract: A device includes a signal generation unit that generates a first signal having a first repetition frequency and a second signal having a second repetition frequency higher than the first repetition frequency, a light source unit that generates light whose wavelength is modulated with time through internal modulation based on the first signal, a modulation unit that further modulates, with time, the wavelength of the light using a Doppler effect through external modulation based on the second signal, a splitting unit that divides the light output from the modulation unit into measurement light and reference light, an irradiation unit that irradiates a target object with the measurement light, a detection unit that detects interference light between reflected light from the target object and the reference light, and a calculation unit that calculates a distance to the target object on the basis of an output signal from the detection unit.
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公开(公告)号：US20220331902A1
公开(公告)日：2022-10-20
申请号：US17641545
申请日：2020-09-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi OGIWARA , Yasunori IGASAKI
IPC: B23K26/067 , B23K26/06
Abstract: A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, and a controller. The controller controls the spatial light modulator so that laser light is branched into a plurality of rays of processing light including 0th-order light and a plurality of converging points for the plurality of rays of processing light are located at positions different from each other in a Z direction and an X direction, and controls at least one of the support part and the converging part so that the X direction coincides with an extension direction of a line and the plurality of converging points move relatively along the line. The controller controls the spatial light modulator so that a converging point of the 0th-order light is located one side with respect to a converging point of non-modulated light of the laser light, in the X direction.
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