Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE WITH MULTILEVEL DRAIN-SELECT ELECTRODES AND METHODS FOR FORMING THE SAME
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Application No.: US17682466Application Date: 2022-02-28
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Publication No.: US20220344266A1Publication Date: 2022-10-27
- Inventor: Akihiro TOBIOKA , Satoshi SHIMIZU
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L23/528 ; H01L27/11556 ; H01L27/11582

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, where the electrically conductive layers include word-line-level electrically conductive layers and drain-select-level electrically conductive layers located above the word-line-level electrically conductive layers, memory opening fill structures vertically extending through the alternating stack, and drain-select-level contact via structures. A first one of the drain-select level contact structures directly contacts at least a first two of the drain-select-level electrically conductive layers that are vertically spaced apart from each other. A second one of the drain-select level contact structures directly contacts at least a second two of the drain-select-level electrically conductive layers that are vertically spaced apart from each other and which are located below the at least the first two of the drain-select-level electrically conductive layers.
Information query
IPC分类: