Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US17642434Application Date: 2020-09-18
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Publication No.: US20220344511A1Publication Date: 2022-10-27
- Inventor: Shunpei YAMAZAKI , Naoki OKUNO , Yasuhiro JINBO , Ryota HODO
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Priority: JP2019-183530 20191004
- International Application: PCT/IB2020/058699 WO 20200918
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
A semiconductor device having favorable electrical characteristics is provided. The semiconductor device includes a first oxide; a first conductor and a second conductor over the first oxide; a first insulator over the first conductor; a second insulator over the second conductor; a second oxide provided over the first oxide and being in contact with the side surface of the first conductor and the side surface of the second conductor; a third oxide provided over the second oxide and including regions in contact with the side surface of the first insulator and the side surface of the second insulator; a third insulator over the third oxide; and a third conductor over the third insulator.
Information query
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