Invention Application
- Patent Title: Thin Film Transistor, Semiconductor Substrate and X-Ray Flat Panel Detector
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Application No.: US17763297Application Date: 2021-04-30
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Publication No.: US20220344517A1Publication Date: 2022-10-27
- Inventor: Jie Huang , Zhengliang Li , Ce Ning , Hehe Hu , Nianqi Yao , Kun Zhao , Fengjuan Liu , Tianmin Zhou , Liping Lei
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN202010591840.5 20200624
- International Application: PCT/CN2021/091596 WO 20210430
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
A thin film transistor includes a gate electrode, an active layer, a gate insulating layer located between the gate electrode and the active layer, and a source electrode and a drain electrode electrically connected to the active layer. The active layer includes a channel layer and at least one channel protection layer; a material of each of the channel layer and the at least one channel protection layer is a metal oxide semiconductor material. The at least one channel protection layer is a crystallizing layer, and metal elements of the at least one channel protection layer include non-rare earth metal elements including In, Ga, Zn and Sn.
Information query
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