Invention Application
- Patent Title: Polishing Article, Polishing System and Method of Polishing
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Application No.: US17773923Application Date: 2020-10-29
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Publication No.: US20220347816A1Publication Date: 2022-11-03
- Inventor: Lian S. Tan , James P. Burke , Justin W. Lerbakken
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- International Application: PCT/IB2020/060152 WO 20201029
- Main IPC: B24B37/26
- IPC: B24B37/26 ; B24B37/04 ; B32B7/12 ; B32B3/12

Abstract:
A polishing article includes a polishing layer having a working surface including at least one multi-cell structure disposed on the working surface. The multi-cell structure includes three cells, defined as a first cell, a second cell and a third cell. Each of the three cells includes at least one sidewall defining a cell shape. The first cell and the second cell include a first common sidewall including a first channel, having a first channel length, allowing fluid communication between the first cell and the second cell, and a first axis perpendicular to the first channel length and substantially parallel to the working surface. Further, the second cell and the third cell include a second common sidewall including a second channel, having a second channel length, allowing fluid communication between the second cell and the third cell, and a second axis perpendicular to the second channel length and substantially parallel to the working surface. An included angle between the first axis and the second axis is from 0° to less than 180°.
Information query