Invention Application
- Patent Title: REACTOR SYSTEMS AND METHODS FOR CLEANING REACTOR SYSTEMS
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Application No.: US17729645Application Date: 2022-04-26
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Publication No.: US20220349051A1Publication Date: 2022-11-03
- Inventor: Amit Mishra , Jereld Lee Winkler , Moataz Bellah Mousa , Mustafa Muhammad , Paul Ma , Hichem M'Saad , Ying-Shen Kuo , Chad Lunceford , Shuaidi Zhang
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/44
- IPC: C23C16/44 ; B08B7/00 ; B08B9/08 ; B08B5/00 ; H01J37/32
Abstract:
A reaction system including a chemical storage assembly in fluid communication with both a remote plasma unit and a bypass line for providing both a plasma activated cleaning species and a non-plasma activated cleaning species to a reaction chamber.
Information query
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