Invention Application
- Patent Title: OPTICAL MODULATOR
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Application No.: US17762982Application Date: 2020-09-17
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Publication No.: US20220350181A1Publication Date: 2022-11-03
- Inventor: Christoffel Johannes Liebenberg , Peter Frans Maria Muys , Heine Melle Mulder
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhowen
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhowen
- International Application: PCT/EP2020/075958 WO 20200917
- Main IPC: G02F1/11
- IPC: G02F1/11 ; G02F1/00

Abstract:
An optical modulator includes an acousto-optic assembly and a thermal management apparatus. The acousto-optic assembly includes: an acousto-optic material; a first side configured to receive an incident light beam; and a second side configured to emit an output light beam based on the incident light beam. The thermal management apparatus includes: a first thermally conductive material in thermal contact with the first side of the acousto-optic assembly; and a second thermally conductive material in thermal contact with the second side of the acousto-optic assembly.
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