- 专利标题: OPTICAL MODULATOR
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申请号: US17762982申请日: 2020-09-17
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公开(公告)号: US20220350181A1公开(公告)日: 2022-11-03
- 发明人: Christoffel Johannes Liebenberg , Peter Frans Maria Muys , Heine Melle Mulder
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhowen
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhowen
- 国际申请: PCT/EP2020/075958 WO 20200917
- 主分类号: G02F1/11
- IPC分类号: G02F1/11 ; G02F1/00
摘要:
An optical modulator includes an acousto-optic assembly and a thermal management apparatus. The acousto-optic assembly includes: an acousto-optic material; a first side configured to receive an incident light beam; and a second side configured to emit an output light beam based on the incident light beam. The thermal management apparatus includes: a first thermally conductive material in thermal contact with the first side of the acousto-optic assembly; and a second thermally conductive material in thermal contact with the second side of the acousto-optic assembly.
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