- 专利标题: MULTI-SHIELD PLATE AND CONTROL SYSTEM
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申请号: US17863960申请日: 2022-07-13
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公开(公告)号: US20220351990A1公开(公告)日: 2022-11-03
- 发明人: Ping-Tse LIN , Wen-Cheng LIEN , Chun-Chih LIN , Monica HO
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; G01B11/14 ; G01N21/84 ; H01L21/268 ; H01L21/324 ; F16P1/06 ; G01B11/06
摘要:
A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.
公开/授权文献
- US11823919B2 Multi-shield plate and control system 公开/授权日:2023-11-21
信息查询
IPC分类: