INTEGRATED CIRCUIT WITH BACKSIDE TRENCH FOR METAL GATE DEFINITION
Abstract:
An integrated circuit includes a first nanosheet transistor and a second nanosheet transistor on a substrate. The first and second nanosheet each include gate electrodes. A gate isolation structure extends from a backside of the substrate between the gate electrodes. The gate isolation structure physically and electrically isolates the first and second gate electrodes from each other.
Public/Granted literature
Information query
Patent Agency Ranking
0/0