Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
-
Application No.: US17275420Application Date: 2020-02-03
-
Publication No.: US20220359166A1Publication Date: 2022-11-10
- Inventor: Nanako Tamari , Kosa Hirota , Masahiro Sumiya , Masahiro Nagatani
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- International Application: PCT/JP2020/003894 WO 20200203
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus including a plasma processing chamber in which an electrode for placing a substrate to be processed is provided; a power supply; and a control device configured to control the power supply, in which the control device is configured to execute heat-retaining discharge under a first condition in which the substrate is not placed on the electrode inside the plasma processing chamber to generate first plasma to heat an inner wall surface to a first temperature, rapid temperature control discharge under a second condition to generate second plasma inside the plasma processing chamber to heat the inner wall surface to a second temperature higher than the first temperature, and product processing of controlling the power supply under a third condition in a state where the substrate is placed on the electrode to generate third plasma inside the plasma processing chamber to process the substrate.
Public/Granted literature
- US12154765B2 Plasma processing apparatus and plasma processing method Public/Granted day:2024-11-26
Information query