- 专利标题: METHODS TO CLEAN CHEMICAL MECHANICAL POLISHING SYSTEMS
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申请号: US17877320申请日: 2022-07-29
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公开(公告)号: US20220362907A1公开(公告)日: 2022-11-17
- 发明人: Chih-Chieh CHANG , Yen-Ting CHEN , Hui-Chi HUANG , Kei-Wei CHEN
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: B24B53/017
- IPC分类号: B24B53/017 ; B24B37/20
摘要:
Provided herein are chemical-mechanical planarization (CMP) systems and methods to reduce metal particle pollution on dressing disks and polishing pads. Such methods may include contacting a dressing disk and at least one conductive element with an electrolyte solution and applying direct current (DC) power to the dressing disk and the at least one conductive element.
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