METHODS TO CLEAN CHEMICAL MECHANICAL POLISHING SYSTEMS
Abstract:
Provided herein are chemical-mechanical planarization (CMP) systems and methods to reduce metal particle pollution on dressing disks and polishing pads. Such methods may include contacting a dressing disk and at least one conductive element with an electrolyte solution and applying direct current (DC) power to the dressing disk and the at least one conductive element.
Public/Granted literature
Information query
Patent Agency Ranking
0/0