Invention Application
- Patent Title: METHODS TO CLEAN CHEMICAL MECHANICAL POLISHING SYSTEMS
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Application No.: US17877320Application Date: 2022-07-29
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Publication No.: US20220362907A1Publication Date: 2022-11-17
- Inventor: Chih-Chieh CHANG , Yen-Ting CHEN , Hui-Chi HUANG , Kei-Wei CHEN
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B37/20

Abstract:
Provided herein are chemical-mechanical planarization (CMP) systems and methods to reduce metal particle pollution on dressing disks and polishing pads. Such methods may include contacting a dressing disk and at least one conductive element with an electrolyte solution and applying direct current (DC) power to the dressing disk and the at least one conductive element.
Public/Granted literature
- US11850704B2 Methods to clean chemical mechanical polishing systems Public/Granted day:2023-12-26
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