• Patent Title: CONVEYANCE ABNORMALITY PREDICTION SYSTEM
  • Application No.: US17765374
    Application Date: 2020-09-18
  • Publication No.: US20220363487A1
    Publication Date: 2022-11-17
  • Inventor: Akira NAKAMURA
  • Applicant: EBARA CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: EBARA CORPORATION
  • Current Assignee: EBARA CORPORATION
  • Current Assignee Address: JP Tokyo
  • Priority: JP2019-181870 20191002
  • International Application: PCT/JP2020/035501 WO 20200918
  • Main IPC: B65G43/02
  • IPC: B65G43/02
CONVEYANCE ABNORMALITY PREDICTION SYSTEM
Abstract:
A conveyance abnormality prediction system includes an estimation unit that has a learned model having machine learned a relationship between a data set including sensor data outputted, at a time of substrate transport in the past, from each of a plurality of sensors provided on a substrate transport unit and a degree of conveyance abnormality at the time of the substrate transport, estimates a degree of conveyance abnormality at a time of new substrate transport by using, as an input, a data set including sensor data outputted from each of the plurality of sensors at the time of the new substrate transport, and outputs the estimated degree of conveyance abnormality.
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