Invention Application
- Patent Title: ELECTROMECHANICAL RESPONSIVE FILM, STACKED ARRANGEMENT AND METHODS OF FORMING THE SAME
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Application No.: US17623380Application Date: 2020-06-30
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Publication No.: US20220367787A1Publication Date: 2022-11-17
- Inventor: Huajun Liu , Kui Yao
- Applicant: Agency for Science, Technology and Research
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Priority: SG10201908039P 20190830
- International Application: PCT/SG2020/050376 WO 20200630
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/047 ; H01L41/316 ; C01G33/00 ; C30B29/32 ; C30B29/30 ; C30B23/02 ; C23C14/08
Abstract:
Various embodiments may provide an electromechanical responsive film. The electromechanical responsive film may include a composition including sodium (Na), potassium (K), niobium (Nb) and oxygen (O). The composition may have a formula (NaxKy)NbO3-δ, wherein 0≤x
Information query
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