Invention Application
- Patent Title: DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DIOXIDE
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Application No.: US17819255Application Date: 2022-08-11
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Publication No.: US20220381653A1Publication Date: 2022-12-01
- Inventor: Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N1/02
- IPC: G01N1/02 ; G01N15/02 ; G01N15/06 ; G01N15/14

Abstract:
A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
Public/Granted literature
- US11815436B2 Detection of surface particles on chamber components with carbon dioxide Public/Granted day:2023-11-14
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