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公开(公告)号：US20250092491A1
公开(公告)日：2025-03-20
申请号：US18370534
申请日：2023-09-20
Applicant: APPLIED MATERIALS, INC.
Inventor： Chien-Min Liao , Chao Liu , Tom Cho , Hyeon Geu Kim , Andrew Nguyen , Hari Ponnekanti , Mingdong Li , Changgong Wang , Bruce Alger
IPC: C22C21/06 , B22F1/16 , B22F1/17 , H01J37/32 , H01L21/683 , H01L21/687
Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.
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公开(公告)号：US12169163B2
公开(公告)日：2024-12-17
申请号：US18493742
申请日：2023-10-24
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
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公开(公告)号：US11441974B2
公开(公告)日：2022-09-13
申请号：US16529630
申请日：2019-08-01
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: Disclosed herein is a method comprising directing, from a distribution unit, a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from the surface of the article; collecting, on a surface of a substrate having a pre-determined initial state comprising initial surface particles on the surface of the substrate or a real-time aerosol sampling unit, at least some of the portion of the plurality of surface particles dislodged from the surface of the article; analyzing the surface of the substrate after performing the collecting; and determining at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged from the surface of the article and collected on the surface of the substrate.
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公开(公告)号：US11815436B2
公开(公告)日：2023-11-14
申请号：US17819255
申请日：2022-08-11
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
CPC classification number: G01N1/02 , G01N15/02 , G01N15/065 , G01N15/14 , G01N2001/028 , G01N2015/0019 , G01N2015/0294 , G01N2015/1493 , G01N2015/1497
Abstract: A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
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公开(公告)号：US11495440B2
公开(公告)日：2022-11-08
申请号：US16996004
申请日：2020-08-18
Applicant: Applied Materials, Inc.
Inventor： Bhaskar Kumar , Prashanth Kothnur , Sidharth Bhatia , Anup Kumar Singh , Vivek Bharat Shah , Ganesh Balasubramanian , Changgong Wang
IPC: H01J37/32
Abstract: Embodiments of the present disclosure generally relate to apparatuses for reducing particle contamination on substrates in a plasma processing chamber. In one or more embodiments, an edge ring is provided and includes a top surface, a bottom surface opposite the top surface and extending radially outward, an outer vertical wall extending between and connected to the top surface and the bottom surface, an inner vertical wall opposite the outer vertical wall, an inner lip extending radially inward from the inner vertical wall, and an inner step disposed between and connected to the inner wall and the bottom surface. During processing, the edge ring shifts the high plasma density zone away from the edge area of the substrate to avoid depositing particles on the substrate when the plasma is de-energized.
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Patent Agency Ranking
公开(公告)号：US20250093238A1
公开(公告)日：2025-03-20
申请号：US18968156
申请日：2024-12-04
Applicant: Applied Materials, Inc.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: A processing device of a particle detection system causes a distribution unit of the particle detection system to initiate a particle collection process to dislodge surface particles from a surface of an article based on a stream including solid carbon dioxide (CO2) particles and/or CO2 droplets directed toward the article. A portion of the dislodged surface particles are collected by a particle sampling component that determines, for collected particles and in real-time, a particle number concentration, a particle size, and/or a particle size distribution. A determination is made based on a signal received by the particle sampling component that the at least one of the particle number concentration, the particle size, or the particle size distribution of the portion of the dislodged surface particles satisfies one or more collection criteria. The processing device causes the distribution unit of the particle detection system to terminate the particle collection process.
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公开(公告)号：US20230048337A1
公开(公告)日：2023-02-16
申请号：US17886748
申请日：2022-08-12
Applicant: Applied Materials, Inc.
Inventor： Robert A. Medure , Raechel Chu-Hui Tan , Changgong Wang , Yuanhong Guo , Sai Padhy , Ashley M. Okada , Kenneth Le , Atilla Kilicarslan , Dean C. Hruzek
Abstract: Disclosed are implementations for minimizing substrate contamination during pressure changes in substrate processing systems. Over a duration of a pressure change (increase or decrease) in a chamber of a substrate processing system, a flow rate is adjusted multiple times to reduce occurrence of contaminant particles in an environment of the chamber. In some instances, the flow rate is changed continuously using at least one dynamic valve that enable continuous control over the pressure dynamics of the chamber.
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公开(公告)号：US20250060298A1
公开(公告)日：2025-02-20
申请号：US18801057
申请日：2024-08-12
Applicant: Applied Materials, Inc.
Inventor： Wei Weng , Chang Ke , Changgong Wang
Abstract: A processing system includes a processing chamber defining a processing region. A foreline is coupled with the processing chamber and defines a fluid conduit. A plasma trap is provided within an interior of the foreline to charge and trap at least some particles in the fluid conduit. The system further includes a particle detector to collect at least some of the charged particles and measure an electric charge produced by the particles.
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公开(公告)号：US12094716B2
公开(公告)日：2024-09-17
申请号：US17473821
申请日：2021-09-13
Applicant: Applied Materials, Inc.
Inventor： Leonard M. Tedeschi , Kartik Ramaswamy , Benjamin C E Schwarz , Changgong Wang , Vahid Firouzdor , Sumanth Banda , Teng-Fang Kou
IPC: H01L21/02 , H01J37/32 , H01L21/3065 , H01L21/311 , H01L21/683
CPC classification number: H01L21/3065 , H01J37/32862 , H01L21/02274 , H01L21/31116 , H01L21/6833 , H01J2237/332 , H01J2237/334
Abstract: Methods of semiconductor processing may include forming a plasma of a carbon-containing material within a processing region of a semiconductor processing chamber. The methods may include depositing a carbon-containing material on a backside of a substrate housed within the processing region of the semiconductor processing chamber. A front side of the substrate may be maintained substantially free of carbon-containing material. The methods may include performing an etch process on the front-side of the substrate. The methods may include removing the carbon-containing material from the backside of the substrate.
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公开(公告)号：US20240060860A1
公开(公告)日：2024-02-22
申请号：US18493742
申请日：2023-10-24
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
CPC classification number: G01N1/02 , G01N15/02 , G01N15/065 , G01N15/14 , G01N2015/1497 , G01N2015/0019
Abstract: A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
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