Invention Application
- Patent Title: Low Resistance Fill Metal Layer Material as Stressor in Metal Gates
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Application No.: US17870964Application Date: 2022-07-22
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Publication No.: US20220384439A1Publication Date: 2022-12-01
- Inventor: Mrunal A Khaderbad , Ziwei Fang , Keng-Chu Lin , Hsueh Wen Tsau
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8234 ; H01L21/8238

Abstract:
An integrated circuit (IC) device includes a semiconductor substrate having a first plurality of stacked semiconductor layers in a p-type transistor region and a second plurality of stacked semiconductor layers in a n-type transistor region. A gate dielectric layer wraps around each of the first and second plurality of stacked semiconductor layers. A first metal gate in the p-type transistor region has a work function metal layer and a first fill metal layer, where the work function metal layer wraps around and is in direct contact with the gate dielectric layer and the first fill metal layer is in direct contact with the work function metal layer. A second metal gate in the n-type transistor region has a second fill metal layer that is in direct contact with the gate dielectric layer, where the second fill metal layer has a work function about equal to or lower than 4.3 eV.
Public/Granted literature
- US11923367B2 Low resistance fill metal layer material as stressor in metal gates Public/Granted day:2024-03-05
Information query
IPC分类: