Invention Application
- Patent Title: LAMINATE AND SEMICONDUCTOR DEVICE
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Application No.: US17775115Application Date: 2020-11-02
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Publication No.: US20220393073A1Publication Date: 2022-12-08
- Inventor: Shigekazu TOMAI , Yoshihiro UEOKA , Satoshi KATSUMATA , Maki KUSHIMOTO , Manato DEKI , Yoshio HONDA , Hiroshi AMANO
- Applicant: IDEMITSU KOSAN CO.,LTD. , NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM , NIKKISO CO., LTD.
- Applicant Address: JP Chiyoda-ku; JP Nagoya-shi; JP Shibuya-ku
- Assignee: IDEMITSU KOSAN CO.,LTD.,NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM,NIKKISO CO., LTD.
- Current Assignee: IDEMITSU KOSAN CO.,LTD.,NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM,NIKKISO CO., LTD.
- Current Assignee Address: JP Chiyoda-ku; JP Nagoya-shi; JP Shibuya-ku
- Priority: JP2019-203232 20191108
- International Application: PCT/JP2020/041005 WO 20201102
- Main IPC: H01L33/42
- IPC: H01L33/42 ; H01L33/32 ; H01L33/12

Abstract:
A stacked body may include a support, a buffer layer, and an electrode layer, in this order, wherein the buffer layer may include one or more metals selected from the group consisting of Ga, Al, In, and Zn, and oxygen, the electrode layer comprises an oxide of magnesium and an oxide of zinc, and the electrode layer has a half width of a diffraction peak observed at 2θ=34.8±0.5 deg in X-ray diffraction measurement of 0.43 deg or smaller.
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