- 专利标题: LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
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申请号: US17817820申请日: 2022-08-05
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公开(公告)号: US20220393422A1公开(公告)日: 2022-12-08
- 发明人: Natsuhiko KOUNO , Masato MORIYA
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 主分类号: H01S3/13
- IPC分类号: H01S3/13 ; H01S3/08 ; H01S3/11 ; H01S3/23 ; G03F7/20
摘要:
A laser apparatus according to an aspect of the present disclosure includes a laser oscillator that outputs pulsed laser light, a deformable mirror including a deformer that deforms a reflective surface, a first processor that drives the deformer during the period for which the reflective surface reflects the pulsed laser light, a homogenizer that homogenizes the pulsed laser light reflected off the deformable mirror, and a spectrum measuring instrument that measures the spectrum of the pulsed laser light homogenized by the homogenizer.
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